Using a Heavy Inert Diffusion Additive for Superconformal Atomic Layer Deposition
使用重惰性扩散添加剂进行超共形原子层沉积
期刊:Journal of Physical Chemistry Letters
影响因子:4.6
doi:10.1021/acs.jpclett.4c03545
Choolakkal, Arun Haridas; Mpofu, Pamburayi; Niiranen, Pentti; Birch, Jens; Pedersen, Henrik
