Design of a 3000-Pixel Transition-Edge Sensor X-Ray Spectrometer for Microcircuit Tomography
用于微电路层析成像的3000像素过渡边缘传感器X射线光谱仪的设计
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doi:10.1109/tasc.2021.3052723
Szypryt, Paul; Bennett, Douglas A; Boone, William J; Dagel, Amber L; Dalton, Gabriella; Doriese, W Bertrand; Durkin, M; Fowler, Joseph W; Garboczi, Edward J; Gard, Johnathon D; Hilton, Gene C; Imrek, Jozsef; Jimenez, Edward S; Kotsubo, Vincent Y; Larson, Kurt; Levine, Zachary H; Mates, John A B; McArthur, Daniel; Morgan, Kelsey M; Nakamura, Nathan; O'Neil, Galen C; Ortiz, Nathan J; Pappas, Christine G; Reintsema, Carl D; Schmidt, Daniel R; Swetz, Daniel S; Thompson, Kyle R; Ullom, Joel N; Walker, Christopher; Weber, Joel C; Wessels, Abigail L; Wheeler, Jason W