Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li(3)PO(4) Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
低压电弧放电氮气等离子体中Li(3)PO(4)阳极蒸发合成磷氧氮化锂(LiPON)薄膜
期刊:Membranes
影响因子:3.6
doi:10.3390/membranes12010040
Gavrilov, Nikolay; Kamenetskikh, Alexander; Tretnikov, Petr; Nikonov, Alexey; Sinelnikov, Leonid; Butakov, Denis; Nikolkin, Viktor; Chukin, Andrey