Correction: Integrated silicon photonic MEMS
更正：集成硅光子MEMS
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-023-00649-2
Quack, Niels; Takabayashi, Alain Yuji; Sattari, Hamed; Edinger, Pierre; Jo, Gaehun; Bleiker, Simon J; Errando-Herranz, Carlos; Gylfason, Kristinn B; Niklaus, Frank; Khan, Umar; Verheyen, Peter; Mallik, Arun Kumar; Lee, Jun Su; Jezzini, Moises; Zand, Iman; Morrissey, Padraic; Antony, Cleitus; O'Brien, Peter; Bogaerts, Wim
