Terahertz MEMS actuators and applications
太赫兹MEMS致动器及其应用
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-026-01169-5
Wang, Zilai; Zhang, Naibo; Zhang, Yiran; Hou, Haozhe; Jin, Yu; Liu, Conghui; Huang, Haijian; Guo, Qiuquan; Huang, Jianming; Cui, Yansong; Ren, Weizheng; Zhang, Dongxing; Han, Ke; Yang, Jun
