Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers
在300毫米晶圆上采用先进的CMOS技术制造超导量子比特
期刊:Nature
影响因子:48.5
doi:10.1038/s41586-024-07941-9
Van Damme, J; Massar, S; Acharya, R; Ivanov, Ts; Perez Lozano, D; Canvel, Y; Demarets, M; Vangoidsenhoven, D; Hermans, Y; Lai, J G; Vadiraj, A M; Mongillo, M; Wan, D; De Boeck, J; Potočnik, A; De Greve, K