Anneal-free ultra-low loss silicon nitride integrated photonics
无需退火的超低损耗氮化硅集成光子学
期刊:Light-Science & Applications
影响因子:23.4
doi:10.1038/s41377-024-01503-4
Bose, Debapam; Harrington, Mark W; Isichenko, Andrei; Liu, Kaikai; Wang, Jiawei; Chauhan, Nitesh; Newman, Zachary L; Blumenthal, Daniel J