A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression
一种具有可重构电极的低噪声微机械加速度计,用于抑制谐振
期刊:Micromachines
影响因子:3
doi:10.3390/mi14061188
Ahmed, Zayed; Duruaku, Charles; Edalatfar, Fatemeh; Moallem, Mehrdad; Bahreyni, Behraad