Using machine learning with optical profilometry for GaN wafer screening
利用机器学习和光学轮廓测量技术进行氮化镓晶圆筛选
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-023-29107-9
Gallagher, James C; Mastro, Michael A; Ebrish, Mona A; Jacobs, Alan G; Gunning, Brendan P; Kaplar, Robert J; Hobart, Karl D; Anderson, Travis J
