Large-scale vivid metasurface color printing using advanced 12-in. immersion photolithography
利用先进的12英寸浸没式光刻技术进行大规模鲜艳超表面彩色打印
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-022-18259-9
Khaidarov, Egor; Eschimese, Damien; Lai, Keng Heng; Huang, Aihong; Fu, Yuan Hsing; Lin, Qunying; Paniagua-Dominguez, Ramon; Kuznetsov, Arseniy I
