Enhanced Secondary-Electron Detection of Single-Ion Implants in Silicon through Thin SiO(2) Layers
通过薄SiO(2)层增强硅中单离子注入的二次电子探测
期刊:Nano Letters
影响因子:9.1
doi:10.1021/acs.nanolett.5c05280
Schneider, E B; Lloyd-Willard, O G; Stockbridge, K; Ludlow, M; Eserin, S; Antwis, L; Cox, D C; Webb, R P; Murdin, B N; Clowes, S K
