Fabrication of Amorphous Silicon-Carbon Hybrid Films Using Single-Source Precursors
利用单源前驱体制备非晶硅-碳混合薄膜
期刊:Inorganic Chemistry
影响因子:4.7
doi:10.1021/acs.inorgchem.3c01846
Sauermoser, Aileen; Lainer, Thomas; Knoechl, Andreas; Goni, Freskida; Fischer, Roland C; Fitzek, Harald; Dienstleder, Martina; Prietl, Christine; Kelterer, Anne-Marie; Bandl, Christine; Jakopic, Georg; Kothleitner, Gerald; Haas, Michael
