Simplified aluminum nitride processing for low-loss integrated photonics and nonlinear optics
简化氮化铝加工工艺,用于低损耗集成光子学和非线性光学器件
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doi:10.1038/s44310-026-00107-7
Yan, Haochen; Zhang, Shuangyou; Pal, Arghadeep; Ghosh, Alekhya; Alabbadi, Abdullah; Kheyri, Masoud; Bi, Toby; Zhang, Yaojing; Harder, Irina; Ohletz, Olga; Gannott, Florentina; Gumann, Alexander; Butzen, Eduard; Ludwig, Katrin; Del'Haye, Pascal