Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films
化学成分、等离子体处理和真空紫外线（VUV）辐照对有机硅酸盐薄膜电性能影响的综合综述
期刊:Polymers
影响因子:4.9
doi:10.3390/polym16152230
Baklanov, Mikhail R; Gismatulin, Andrei A; Naumov, Sergej; Perevalov, Timofey V; Gritsenko, Vladimir A; Vishnevskiy, Alexey S; Rakhimova, Tatyana V; Vorotilov, Konstantin A
