Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
利用扫描电子显微镜和过渡边缘传感器光谱仪对集成电路进行纳米级三维成像
期刊:Sensors
影响因子:3.5
doi:10.3390/s24092890
Nakamura, Nathan; Szypryt, Paul; Dagel, Amber L; Alpert, Bradley K; Bennett, Douglas A; Doriese, William Bertrand; Durkin, Malcolm; Fowler, Joseph W; Fox, Dylan T; Gard, Johnathon D; Goodner, Ryan N; Harris, James Zachariah; Hilton, Gene C; Jimenez, Edward S; Kernen, Burke L; Larson, Kurt W; Levine, Zachary H; McArthur, Daniel; Morgan, Kelsey M; O'Neil, Galen C; Ortiz, Nathan J; Pappas, Christine G; Reintsema, Carl D; Schmidt, Daniel R; Schultz, Peter A; Thompson, Kyle R; Ullom, Joel N; Vale, Leila; Vaughan, Courtenay T; Walker, Christopher; Weber, Joel C; Wheeler, Jason W; Swetz, Daniel S