Achieving 0.05 Ω-mm contact resistance in non-alloyed Ti/Au ohmics to β-Ga(2)O(3) by removing surface carbon
通过去除表面碳，使非合金化Ti/Au欧姆接触与β-Ga₂O₃的接触电阻达到0.05 Ω·mm。
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doi:10.1063/5.0276786
Pieczulewski, Naomi; Smith, Kathleen T; Efaw, Corey M; Singh, Arjan; Gorsak, Cameron A; Buontempo, Joshua T; Wensel, Jesse; Azizie, Kathy; Gann, Katie; Thompson, Michael O; Schlom, Darrell G; Rana, Farhan; Nair, Hari P; Hues, Steven M; Graugnard, Elton; Davis, Paul H; Jena, Debdeep; Xing, Huili Grace; Muller, David A
