Air-coupled piezoelectric micromachined ultrasonic transducer array based on low-cost and large remnant polarization PZT thin film
基于低成本、大剩余极化PZT薄膜的空气耦合压电微机械超声换能器阵列
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-025-22077-0
Lin, Jia-Ling; Liu, Ya-Han; Kao, Chien-Lun; Wu, Shao-Wei; Hsu, Han-Jen; Lin, Hsiao-Chi; Li, Chih-Ying; Chen, Chun-Yuan; Wang, Yeong-Her; Huang, Chih-Hsien