Mapping of the mechanical response in Si/SiGe nanosheet device geometries
Si/SiGe纳米片器件几何结构中力学响应的映射
期刊:Angewandte Chemie-International Edition
影响因子:16.9
doi:10.1002/anie.202506864
Wang, Dong-Xia; Gallea, José Ignacio; Kong, De-Ming; Enderlein, Jörg; Chen, Tao; Murray, Conal E; Yan, Hanfei; Lavoie, Christian; Jordan-Sweet, Jean; Pattammattel, Ajith; Reuter, Kathleen; Hasanuzzaman, Mohammad; Lanzillo, Nicholas; Robison, Robert; Loubet, Nicolas
