Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings
方位角旋转控制的纳米刻蚀技术,用于连续图案化周期和形状可调的非对称纳米光栅
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-024-00687-4
Lee, Useung; Kim, Hyein; Oh, Dong Kyo; Lee, Nayeong; Park, Jonggab; Park, Jaewon; Son, Hyunji; Noh, Hyunchan; Rho, Junsuk; Ok, Jong G