Wafer map failure pattern classification using geometric transformation-invariant convolutional neural network
基于几何变换不变卷积神经网络的晶圆图失效模式分类
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-023-34147-2
Jeong, Iljoo; Lee, Soo Young; Park, Keonhyeok; Kim, Iljeok; Huh, Hyunsuk; Lee, Seungchul
