Simulation of Capacitorless DRAM Based on the Polycrystalline Silicon Nanotube Structure with Multiple Grain Boundaries
基于多晶硅纳米管结构和多晶界的无电容DRAM仿真
期刊:Nanomaterials
影响因子:4.3
doi:10.3390/nano13132026
Park, Jin; Lee, Sang-Ho; Kang, Ga-Eon; Heo, Jun-Hyeok; Jeon, So-Ra; Kim, Min-Seok; Bae, Seung-Ji; Hong, Jeong-Woo; Jang, Jae-Won; Bae, Jin-Hyuk; Lee, Sin-Hyung; Kang, In-Man