Hybrid Metrology for Nanostructured Optical Metasurfaces
用于纳米结构光学超表面的混合计量
期刊:ACS Applied Materials & Interfaces
影响因子:8.2
doi:10.1021/acsami.3c13923
Murataj, Irdi; Angelini, Angelo; Cara, Eleonora; Porro, Samuele; Beckhoff, Burkhard; Kayser, Yves; Hönicke, Philipp; Ciesielski, Richard; Gollwitzer, Christian; Soltwisch, Victor; Perez-Murano, Francesc; Fernandez-Regulez, Marta; Carignano, Stefano; Boarino, Luca; Castellino, Micaela; Ferrarese Lupi, Federico