Capacitance-Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays
静电驱动MEMS微镜阵列的电容-电压特性研究
期刊:Micromachines
影响因子:3
doi:10.3390/mi16020157
Chen, Jiahao; Yang, Xiaohui; Iskhandar, Mustaqim Siddi Que; Hasan, Md Kamrul; Baby, Shilby; Qasim, Muhammad Hasnain; Löber, Dennis; Liu, Shujie; Donatiello, Roland; Liebermann, Steffen; Xu, Guilin; Hillmer, Hartmut