Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale Nanofabrication
超越二元图案化:聚碳酸丙烯酯作为一种多功能热敏抗蚀剂,用于高保真灰度纳米加工
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-025-01032-z
Li, Hongtao; Li, Jixiang; Jin, Zeming; Ma, Haonan; Zhao, Shijie; Hu, Ziying; Zhang, Mingdi; Fu, Wenke; Wang, Jiakai; Dai, Yunyun; Huang, Yuan; Liu, Xia; Wang, Yeliang