Impact of Nitridation on Bias Temperature Instability and Hard Breakdown Characteristics of SiON MOSFETs
氮化对SiON MOSFET偏置温度不稳定性及硬击穿特性的影响
期刊:Micromachines
影响因子:3
doi:10.3390/mi14081514
Tyaginov, Stanislav; O'Sullivan, Barry; Chasin, Adrian; Rawal, Yaksh; Chiarella, Thomas; de Carvalho Cavalcante, Camila Toledo; Kimura, Yosuke; Vandemaele, Michiel; Ritzenthaler, Romain; Mitard, Jerome; Palayam, Senthil Vadakupudhu; Reifsnider, Jason; Kaczer, Ben