A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator
一种利用无机分子光刻介质制备敏感电子材料的通用全干式微加工方法
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-026-68593-z
Zeng, Cheng; Xu, Yongshan; Wei, Xinqi; Liang, Jianing; Sun, Zongdong; He, Xiaoyu; Du, Gaofeng; Wang, Shuhao; Liu, Yao; Zhou, Xing; Li, Yuan; Liu, Kailang; Ma, Ying; Zhai, Tianyou; Li, Huiqiao