The Phase Modulating Micro-Mover Based on the MHD/MET System in the Reference Arm of the Scanning Interferometer
基于MHD/MET系统的扫描干涉仪参考臂相位调制微型移动器
期刊:Micromachines
影响因子:3
doi:10.3390/mi13111972
Kalenkov, Sergey; Skvortsov, Pavel; Tarasenko, Aleksandr; Sharov, Dmitry; Shtanko, Alexander
