Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures
利用分子动力学模拟研究GaN基结构中用于侧壁损伤修复的原子层刻蚀
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-026-38333-w
Kim, Eun Koo; Hong, Jong Woo; Lim, Woong Sun; Kim, Ja Yeon; Kim, Kyung Lim; Park, Jong Soon; Park, Yun Jae; Kim, Chan Ho; Eoh, Hyeong Joon; Jeong, Jun Won; Kim, Sung Hyun; Jeon, Young Woo; Kim, Dong Woo; Yeom, Geun Young