Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging
采用旋涂玻璃封装工艺制成的机械强度高、可自清洁的封装式金属透镜
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-025-00925-3
Yang, Younghwan; Kang, Dohyun; Seong, Junhwa; Kim, Kyungtae; Kim, Seokwoo; Jung, Chunghwan; Lee, Eunji; Heo, Hyeonsu; Kang, Hyunjung; Jeon, Nara; Lee, Jihae; Jeon, Youngsun; Park, Yujin; Rho, Junsuk