Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
用于快速测量直径小于 100 µm 的微孔内部粗糙度和机械性能的细长压阻式硅微探针
期刊:Sensors
影响因子:3.5
doi:10.3390/s19061410
Brand, Uwe; Xu, Min; Doering, Lutz; Langfahl-Klabes, Jannick; Behle, Heinrich; Bütefisch, Sebastian; Ahbe, Thomas; Peiner, Erwin; Völlmeke, Stefan; Frank, Thomas; Mickan, Bodo; Kiselev, Ilia; Hauptmannl, Michael; Drexel, Michael
