Si-rich Al2O3 films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment
采用射频磁控溅射法生长富硅Al2O3薄膜：退火处理对其结构和光致发光性能的影响
期刊:Nanoscale Research Letters
影响因子:
doi:10.1186/1556-276X-8-273
Korsunska, Nadiia; Khomenkova, Larysa; Kolomys, Oleksandr; Strelchuk, Viktor; Kuchuk, Andrian; Kladko, Vasyl; Stara, Tetyana; Oberemok, Oleksandr; Romanyuk, Borys; Marie, Philippe; Jedrzejewski, Jedrzej; Balberg, Isaac
