Material-specific high-resolution table-top extreme ultraviolet microscopy
材料特异性高分辨率台式极紫外显微镜
期刊:Light-Science & Applications
影响因子:23.4
doi:10.1038/s41377-022-00797-6
Eschen, Wilhelm; Loetgering, Lars; Schuster, Vittoria; Klas, Robert; Kirsche, Alexander; Berthold, Lutz; Steinert, Michael; Pertsch, Thomas; Gross, Herbert; Krause, Michael; Limpert, Jens; Rothhardt, Jan