Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film
通过嵌段共聚物薄膜超低能磷离子注入在硅中形成周期性掺杂阵列
期刊:ACS Applied Materials & Interfaces
影响因子:8.2
doi:10.1021/acsami.3c03782
Kuschlan, Stefano; Chiarcos, Riccardo; Laus, Michele; Pérez-Murano, Francesc; Llobet, Jordi; Fernandez-Regulez, Marta; Bonafos, Caroline; Perego, Michele; Seguini, Gabriele; De Michielis, Marco; Tallarida, Graziella
