Piezoresistive Platinum Diselenide Pressure Sensors with Reliable High Sensitivity and Their Integration into Complementary Metal-Oxide-Semiconductor Circuits
具有可靠高灵敏度的压阻式二硒化铂压力传感器及其在互补金属氧化物半导体电路中的集成
期刊:ACS Nano
影响因子:16
doi:10.1021/acsnano.4c15098
Lukas, Sebastian; Rademacher, Nico; Cruces, Sofía; Gross, Michael; Desgué, Eva; Heiserer, Stefan; Dominik, Nikolas; Prechtl, Maximilian; Hartwig, Oliver; Ó Coileáin, Cormac; Stimpel-Lindner, Tanja; Legagneux, Pierre; Rantala, Arto; Saari, Juha-Matti; Soikkeli, Miika; Duesberg, Georg S; Lemme, Max C