Backscattering design for a focusing grating coupler with fully etched slots for transverse magnetic modes
用于聚焦光栅耦合器的背散射设计,该耦合器具有用于横磁模式的全蚀刻槽。
期刊:Scientific Reports
影响因子:3.9
doi:10.1038/s41598-018-36082-z
Hoffmann, Jahn; Schulz, K Marvin; Pitruzzello, Giampaolo; Fohrmann, Lena Simone; Petrov, Alexander Yu; Eich, Manfred