LONG-TERM EVALUATION OF A NON-HERMETIC MICROPACKAGE TECHNOLOGY FOR MEMS-BASED, IMPLANTABLE PRESSURE SENSORS
用于基于MEMS的植入式压力传感器的非密封微封装技术的长期评估
期刊:
影响因子:
doi:10.1109/transducers.2015.7180966
Wang, P; Majerus, S J A; Karam, R; Hanzlicek, B; Lin, D L; Zhu, H; Anderson, J M; Damaser, M S; Zorman, C A; Ko, W H
