Efficient electrodynamic stripping for 12-inch wafer-scale freestanding ferroelectric oxide membranes
高效电动力剥离法制备12英寸晶圆级独立式铁电氧化物薄膜
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-025-66697-6
Li, Hangren; Tu, Jie; Du, Siyuan; Xi, Guoqiang; Liu, Chen; Fang, Yue-Wen; Xu, Shuai; Zhang, Jia-Han; Sun, Enqi; Ouyang, Shunli; Liu, Xudong; Shi, Longyuan; Liu, Xiuqiao; Zheng, Dongxing; Guo, Lei; Zhang, Xixiang; Jin, Kuijuan; Tian, Jianjun; Zhang, Linxing; Xing, Xianran