Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates
在商用衬底上生长高度c轴取向的AlScN薄膜
期刊:Micromachines
影响因子:3
doi:10.3390/mi13050783
Su, Jingxiang; Fichtner, Simon; Ghori, Muhammad Zubair; Wolff, Niklas; Islam, Md Redwanul; Lotnyk, Andriy; Kaden, Dirk; Niekiel, Florian; Kienle, Lorenz; Wagner, Bernhard; Lofink, Fabian