Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System
亚弧秒级微型驱动旋转系统的定位性能
期刊:Micromachines
影响因子:3
doi:10.3390/mi12091063
Yang, Manzhi; Lv, Zhenyang; Zhang, Chuanwei; Yang, Yizhi; Jing, Gang; Guo, Wei; Lu, Zhengxiong; Huang, Yumei; Wei, Kaiyang; Li, Linyue; Feng, Bin; Ge, Hongyu