Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer.
闭环微机电系统电容式加速度计的组合温度补偿方法
期刊:Micromachines
影响因子:3
doi:10.3390/mi14081623
Liu Guowen, Liu Yu, Li Zhaohan, Ma Zhikang, Ma Xiao, Wang Xuefeng, Zheng Xudong, Jin Zhonghe
