Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption
基于MEMS萨格纳克环反射器的全可调谐法布里-珀罗腔,具有超低静态功耗
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-024-00728-y
Park, Young Jae; Her, Man Jae; Jeong, Youngjae; Choi, Dong Ju; Kim, Dong Uk; Lim, Min Gi; Hong, Myung Seok; Kwon, Hyug Su; Yu, Kyoungsik; Han, Sangyoon