Tuning the optical, electrical, and structural properties of Cu-DLC thin films via simultaneous DC-RF unbalanced magnetron sputtering
通过同步直流-射频非平衡磁控溅射调控Cu-DLC薄膜的光学、电学和结构特性
期刊:Heliyon
影响因子:3.6
doi:10.1016/j.heliyon.2024.e40171
Mikhchin, Alireza; Hosseini, Seyed Iman; Khodadadi Najaf Abadi, Saeid; Mohammadhosseini, Babak; Mehrabian, Somayeh
