Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-κ Y(2)O(3) on GaAs(001)-4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy
基于原位同步辐射光电子能谱的原子层沉积高κ Y(2)O(3)在GaAs(001)-4 × 6上的生长机制的原子性质
期刊:ACS Omega
影响因子:4.3
doi:10.1021/acsomega.7b01564
Cheng, Chiu-Ping; Chen, Wan-Sin; Cheng, Yi-Ting; Wan, Hsien-Wen; Yang, Cheng-Yeh; Pi, Tun-Wen; Kwo, Jueinai; Hong, Minghwei