Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates
电子辐照诱导石英和蓝宝石衬底上TiN薄膜的退化
期刊:ACS Omega
影响因子:4.3
doi:10.1021/acsomega.3c07053
Akhtanova, Gulnur; Yerlanuly, Yerassyl; Parkhomenko, Hryhorii P; Solovan, Mykhailo V; Mostovyi, Andrii I; Nurmukhanbetova, Aliya K; Kireyev, Alexander V; Danko, Igor V; Oreshkin, Pavel A; Zholdybayev, Timur K; Janseitov, Daniyar M; Ramazanov, Tlekkabul S; Brus, Viktor V