Poly(styrene)-block-Maltoheptaose Films for Sub-10 nm Pattern Transfer: Implications for Transistor Fabrication
用于亚10纳米图案转移的聚苯乙烯-嵌段-麦芽七糖薄膜:对晶体管制造的启示
期刊:ACS Applied Nano Materials
影响因子:5.5
doi:10.1021/acsanm.1c00582
Löfstrand, Anette; Jafari Jam, Reza; Mothander, Karolina; Nylander, Tommy; Mumtaz, Muhammad; Vorobiev, Alexei; Chen, Wen-Chang; Borsali, Redouane; Maximov, Ivan