Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities
具有自校准功能的MEMS压力传感器的热性能数值研究
期刊:Sensors
影响因子:3.5
doi:10.3390/s22103828
de Clerck, Albrey; Kang, Yuhong; Sibold, Ridge; Mouring, Scott; Ruan, Hang; Ng, Wing
