Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography
利用原位3D纳米光刻技术实现光通信引擎的混合多芯片组装
期刊:Light-Science & Applications
影响因子:23.4
doi:10.1038/s41377-020-0272-5
Blaicher, Matthias; Billah, Muhammad Rodlin; Kemal, Juned; Hoose, Tobias; Marin-Palomo, Pablo; Hofmann, Andreas; Kutuvantavida, Yasar; Kieninger, Clemens; Dietrich, Philipp-Immanuel; Lauermann, Matthias; Wolf, Stefan; Troppenz, Ute; Moehrle, Martin; Merget, Florian; Skacel, Sebastian; Witzens, Jeremy; Randel, Sebastian; Freude, Wolfgang; Koos, Christian
