Excimer-ultraviolet-lamp-assisted selective etching of single-layer graphene and its application in edge-contact devices
准分子紫外灯辅助选择性刻蚀单层石墨烯及其在边缘接触器件中的应用
期刊:Nano Convergence
影响因子:11
doi:10.1186/s40580-024-00442-5
Shin, Minjeong; Kim, Jin Hong; Ko, Jin-Yong; Haidari, Mohd Musaib; Jang, Dong Jin; Lee, Kihyun; Kim, Kwanpyo; Kim, Hakseong; Park, Bae Ho; Choi, Jin Sik