Chemical, Structural, and Electrical Changes in Molecular Layer-Deposited Hafnicone Thin Films after Thermal Processing
热处理后分子层沉积的铪薄膜的化学、结构和电学变化
期刊:ACS Applied Electronic Materials
影响因子:4.3
doi:10.1021/acsaelm.4c00683
Vamseedhara Vemuri, Sean W King, Ryan Thorpe, Andrew H Jones, John T Gaskins, Patrick E Hopkins, Nicholas C Strandwitz
