The Nanolithography Toolbox
纳米光刻工具箱
期刊:Journal of Research of the National Institute of Standards and Technology
影响因子:1.3
doi:10.6028/jres.121.024
Balram, Krishna C; Westly, Daron A; Davanço, Marcelo; Grutter, Karen E; Li, Qing; Michels, Thomas; Ray, Christopher H; Yu, Liya; Kasica, Richard J; Wallin, Christopher B; Gilbert, Ian J; Bryce, Brian A; Simelgor, Gregory; Topolancik, Juraj; Lobontiu, Nicolae; Liu, Yuxiang; Neuzil, Pavel; Svatos, Vojtech; Dill, Kristen A; Bertrand, Neal A; Metzler, Meredith G; Lopez, Gerald; Czaplewski, David A; Ocola, Leonidas; Srinivasan, Kartik A; Stavis, Samuel M; Aksyuk, Vladimir A; Liddle, J Alexander; Krylov, Slava; Ilic, B Robert